Comment stsetch2 SNF 2010-06-24 11:16:38: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Thu Jun 24 11:16:38 PDT 2010
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Comment stsetch2 SNF 2010-06-24 09:15:37: Update
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Problem stsetch2 SNF 2010-06-24 13:38:57: Loadlock not pumping down
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Now running two test wafers.
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Comment stsetch2 SNF 2010-06-24 09:15:37: Update
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Problem stsetch2 SNF 2010-06-24 13:38:57: Loadlock not pumping down
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