Problem stsetch2 SNF 2010-06-24 13:38:57: Loadlock not pumping down

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Jun 24 13:38:57 PDT 2010


Pumps down to only 120 mT and unable to transfer wafer.




More information about the stsetch2-pcs mailing list