Problem stsetch2 SNF 2010-06-25 00:44:16: LLC error

rostam at snf.stanford.edu rostam at snf.stanford.edu
Fri Jun 25 00:44:16 PDT 2010


sometimes when the carousel is rotating to put the wafer inside the chamber, it stops half-way and LLC error occurs. You have to abort the error and press the Abort recipe, HRM1 Abort, and TMC Abort, then vent the chamber, pump the chamber and try again.




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