Shutdown stsetch2 SNF 2010-06-26 22:35:11: wafer stuck in chamber

srikantv at srikantv at
Sat Jun 26 22:35:12 PDT 2010

Machine stalled in middle of recipe.
After aborting process, not able to unload wafer.
Pressure is stuck at 131mT (possible reason?)
Please unload wafer into cassette.

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