Shutdown stsetch2 SNF 2010-06-26 22:35:11: wafer stuck in chamber

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Tue Jun 29 15:50:05 PDT 2010


Both the turbo pump and backing pumps were off. There was a PLC fault. Resetting the PLC multiple times solved the problem.  Jim




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