From jsnapp at snf.stanford.edu Fri Mar 5 15:05:55 2010 From: jsnapp at snf.stanford.edu (jsnapp at snf.stanford.edu) Date: Fri, 5 Mar 2010 15:05:55 -0800 Subject: Problem stsetch2 SNF 2010-03-05 15:05:54: Drive is FULL! Message-ID: 16.2GB drive has now <10kB of disk space. Software crashed when I tried to make a recipe, couldn't even discard the new recipe. Deletes some random junk (sample pictures in My Pictures folder) to get 1MB of free space. Are user's recipes really taking up GB of space? If not, what is? Definitely need to free up some space. It would also be nice to know there is a regular backup of the recipes on the tool to an out of the fab storage location. From srikantv at snf.stanford.edu Fri Mar 5 17:12:03 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Fri, 5 Mar 2010 17:12:03 -0800 Subject: Comment stsetch2 SNF 2010-03-05 17:12:02: Cleared some space Message-ID: Moved logfiles to D:\Scheduler Logfiles 4GB free now From eenriquez at snf.stanford.edu Mon Mar 8 14:42:30 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2010 14:42:30 -0800 Subject: Problem stsetch2 SNF 2010-03-05 15:05:54: Drive is FULL! Message-ID: Jim Mc and a user moved some old log files. Now have 4 Gb free. From eenriquez at snf.stanford.edu Mon Mar 8 14:42:37 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Mar 2010 14:42:37 -0800 Subject: Comment stsetch2 SNF 2010-03-05 17:12:02: Cleared some space Message-ID: Archived From rostam at snf.stanford.edu Wed Mar 10 18:04:56 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 10 Mar 2010 18:04:56 -0800 Subject: Problem stsetch2 SNF 2010-03-10 18:04:55: grass Message-ID: Today I etched a wafer with same recipe I did two weeks ago. The wafer is full of grass. I didn't have any grass two weeks ago. Has anything changed about the machine? From mcvittie at snf.stanford.edu Thu Mar 11 12:49:09 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 11 Mar 2010 12:49:09 -0800 Subject: Shutdown stsetch2 SNF 2010-03-11 12:49:08: Need Passwd to reset generator fault Message-ID: From eenriquez at snf.stanford.edu Thu Mar 11 14:01:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 11 Mar 2010 14:01:27 -0800 Subject: Shutdown stsetch2 SNF 2010-03-11 12:49:08: Need Passwd to reset generator fault Message-ID: Gave Jim the password From rostam at snf.stanford.edu Fri Mar 19 00:33:14 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Fri, 19 Mar 2010 00:33:14 -0700 Subject: Comment stsetch2 SNF 2010-03-19 00:33:13: no grass Message-ID: Wafer etched with the same recipe (problem reported 3/10/10). No grass observed. Etch profile is the same as last month and looks good. From eenriquez at snf.stanford.edu Fri Mar 19 07:48:01 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2010 07:48:01 -0700 Subject: Problem stsetch2 SNF 2010-03-10 18:04:55: grass Message-ID: Wafer etched with the same recipe (problem reported 3/10/10). No grass observed. Etch profile is the same as last month and looks good. From eenriquez at snf.stanford.edu Fri Mar 19 07:48:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 19 Mar 2010 07:48:10 -0700 Subject: Comment stsetch2 SNF 2010-03-19 00:33:13: no grass Message-ID: Archived From jjeong1 at snf.stanford.edu Mon Mar 29 16:02:47 2010 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Mon, 29 Mar 2010 16:02:47 -0700 Subject: Problem stsetch2 SNF 2010-03-29 16:02:47: Etch rate is not stable Message-ID: I ran two wafers to measure Si etch rate. For the first wafer, the etch rate was 3.5um/min, but it dropped to 1.8um/min for the second one. The second one was run right after the first one. (Two weeks ago, it was ~7.4um/min and the wafer-to-wafer etch rate was quite stable.) From srikantv at snf.stanford.edu Tue Mar 30 09:58:59 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 30 Mar 2010 09:58:59 -0700 Subject: Shutdown stsetch2 SNF 2010-03-30 09:58:59: No coil power Message-ID: 0W in the 13.56 MHz coil power From mcvittie at snf.stanford.edu Tue Mar 30 14:39:29 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 30 Mar 2010 14:39:29 -0700 Subject: Shutdown stsetch2 SNF 2010-03-30 09:58:59: No coil power Message-ID: Rf generator appears to have gotten into a fault mode and was not outputting any power. After lunch the problem had cleared up, I had no problem running processes. In looking at process history I found that the problem began with a user running at 3000W. The max usable is 2500W. I deleted all the user's 3000W recipes. In the next few days I will delete all processses created from before the funnel installation and all those vwith powers about 2500W. Jim From mcvittie at snf.stanford.edu Tue Mar 30 14:40:56 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 30 Mar 2010 14:40:56 -0700 Subject: Problem stsetch2 SNF 2010-03-29 16:02:47: Etch rate is not stable Message-ID: At this time I think the problem was caused by running at power levels above 2500W. I am deleting all processes with power levels about 2500W. Jim From mmessana at snf.stanford.edu Tue Mar 30 18:08:02 2010 From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu) Date: Tue, 30 Mar 2010 18:08:02 -0700 Subject: Comment stsetch2 SNF 2010-03-30 18:08:02: tool worked fine for me Message-ID: Same etch rate and profile as in January.