Problem stsetch2 SNF 2010-03-10 18:04:55: grass

rostam at snf.stanford.edu rostam at snf.stanford.edu
Wed Mar 10 18:04:56 PST 2010

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Today I etched a wafer with same recipe I did two weeks ago. The wafer is full of grass. I didn't have any grass two weeks ago. Has anything changed about the machine?

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