Comment stsetch2 SNF 2010-03-19 00:33:13: no grass

rostam at snf.stanford.edu rostam at snf.stanford.edu
Fri Mar 19 00:33:14 PDT 2010


Wafer etched with the same recipe (problem reported 3/10/10). No grass observed. Etch profile is the same as last month and looks good.




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