Problem stsetch2 SNF 2010-03-10 18:04:55: grass

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Mar 19 07:48:01 PDT 2010

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Wafer etched with the same recipe (problem reported 3/10/10). No grass observed. Etch profile is the same as last month and looks good.

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