Shutdown stsetch2 SNF 2010-03-30 09:58:59: No coil power
srikantv at snf.stanford.edu
srikantv at snf.stanford.edu
Tue Mar 30 09:58:59 PDT 2010
Previous message:
Problem stsetch2 SNF 2010-03-29 16:02:47: Etch rate is not stable
Next message:
Shutdown stsetch2 SNF 2010-03-30 09:58:59: No coil power
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
0W in the 13.56 MHz coil power
Previous message:
Problem stsetch2 SNF 2010-03-29 16:02:47: Etch rate is not stable
Next message:
Shutdown stsetch2 SNF 2010-03-30 09:58:59: No coil power
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the stsetch2-pcs mailing list