Comment stsetch2 SNF 2010-03-30 18:08:02: tool worked fine for me
mmessana at snf.stanford.edu
mmessana at snf.stanford.edu
Tue Mar 30 18:08:02 PDT 2010
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Shutdown stsetch2 SNF 2010-03-30 09:58:59: No coil power
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Same etch rate and profile as in January.
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Shutdown stsetch2 SNF 2010-03-30 09:58:59: No coil power
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