From mcvittie at snf.stanford.edu Sun May 2 21:08:12 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 2 May 2010 21:08:12 -0700 Subject: Shutdown stsetch2 SNF 2010-04-27 22:30:23: Can't load wafers Message-ID: The turbo pump fail because of a water cooling problem. The water lines were flushed by Elmer and the pump appears to be working OK. Please see note sent to users concerning the power dropout problem. Jim From eenriquez at snf.stanford.edu Tue May 4 08:55:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 4 May 2010 08:55:18 -0700 Subject: Comment stsetch2 SNF 2010-04-28 19:08:18: Update turbo problem Message-ID: Archived. Pump was OK, flushed out cooling line From srikantv at snf.stanford.edu Tue May 4 17:04:09 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 4 May 2010 17:04:09 -0700 Subject: Problem stsetch2 SNF 2010-05-04 17:04:08: High reflected power Message-ID: Matching network often fails, resulting in high reflected power which causes an error and shutdown From jjeong1 at snf.stanford.edu Tue May 4 20:33:38 2010 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Tue, 4 May 2010 20:33:38 -0700 Subject: Problem stsetch2 SNF 2010-05-04 20:33:37: Plasma blinks Message-ID: Forwarded power fluctuates and plasma blinks. From rostam at snf.stanford.edu Wed May 5 08:26:43 2010 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 5 May 2010 08:26:43 -0700 Subject: Problem stsetch2 SNF 2010-05-05 08:26:42: huge nonuniformity Message-ID: There is no grass on the right hand side of the wafer. There is lots of grass on the left hand side of the wafer (looking at the wafer with flat toward me). From eenriquez at snf.stanford.edu Wed May 5 19:14:45 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 5 May 2010 19:14:45 -0700 Subject: Comment stsetch2 SNF 2010-05-05 19:14:44: Update Message-ID: Adjusted wafer positioning on the chuck. Greatly improved uniformity of the "30 mod" recipe but still can be better. Will adjust wafer positioning again tomorrow. Also removed a non-functioning coil cover cooling fan. Ordered a new fan. From eenriquez at snf.stanford.edu Thu May 6 14:31:40 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 6 May 2010 14:31:40 -0700 Subject: Comment stsetch2 SNF 2010-05-06 14:31:40: Update Message-ID: anti condensation unit (chamber bottom N2 purge) checked out OK. From ericp at snf.stanford.edu Mon May 10 22:38:41 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 10 May 2010 22:38:41 -0700 Subject: Shutdown stsetch2 SNF 2010-05-10 22:38:41: tool marked as "Down-Maint" Message-ID: The tool is "yellow" on coral, implying that it can be used, while it has been marked with a "Down-Main" tag for some time. Better to avoid confusion and properly indicate tool status on coral (so people don't waste time coming in to find out that the tool remains broken). From eenriquez at snf.stanford.edu Tue May 18 10:24:09 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 18 May 2010 10:24:09 -0700 Subject: Comment stsetch2 SNF 2010-05-18 10:24:08: Update field service Message-ID: According to STS service manager, the soonest the field service can be on site is the end of next week. From eenriquez at snf.stanford.edu Fri May 21 15:39:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 21 May 2010 15:39:57 -0700 Subject: Comment stsetch2 SNF 2010-05-21 15:39:56: Update Message-ID: Replaced one of the tuning capacitors. We will reassemble and test it by Monday From eenriquez at snf.stanford.edu Mon May 24 14:03:02 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 14:03:02 -0700 Subject: Comment stsetch2 SNF 2010-05-24 14:03:01: Updage Message-ID: Re-assemble the system after replacing one of the tuning capacitors in the matching network. Ran the KY ver2 recipe (15 min etch) three times so far. The zero power drop-out with the first run. One drop-out the with each of the 2nd and 3rd runs. We will continue to test but if it continues to behave I will release the system by 3 pm. From eenriquez at snf.stanford.edu Mon May 24 14:03:17 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 14:03:17 -0700 Subject: Comment stsetch2 SNF 2010-05-05 19:14:44: Update Message-ID: archived From eenriquez at snf.stanford.edu Mon May 24 14:03:22 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 14:03:22 -0700 Subject: Comment stsetch2 SNF 2010-05-06 14:31:40: Update Message-ID: archived From eenriquez at snf.stanford.edu Mon May 24 14:03:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 14:03:33 -0700 Subject: Comment stsetch2 SNF 2010-05-21 15:39:56: Update Message-ID: archived From eenriquez at snf.stanford.edu Mon May 24 14:03:40 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 14:03:40 -0700 Subject: Comment stsetch2 SNF 2010-05-18 10:24:08: Update field service Message-ID: archived From eenriquez at snf.stanford.edu Mon May 24 15:43:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 15:43:16 -0700 Subject: Shutdown stsetch2 SNF 2010-05-10 22:38:41: tool marked as "Down-Maint" Message-ID: Replaced a tuning capacitors in the matching network. Ran the KY ver2 recipe (15 min etch) six times so far. The zero power drop-out with the first run, 4th, 5th and 6th. One drop-out the with each of the 2nd and 3rd runs. From eenriquez at snf.stanford.edu Mon May 24 15:43:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 24 May 2010 15:43:31 -0700 Subject: Comment stsetch2 SNF 2010-05-24 14:03:01: Updage Message-ID: Archived From mtan at snf.stanford.edu Tue May 25 01:56:53 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 25 May 2010 01:56:53 -0700 Subject: Shutdown stsetch2 SNF 2010-05-25 01:56:53: wafer broke inside the chamber Message-ID: From eenriquez at snf.stanford.edu Tue May 25 15:06:28 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 May 2010 15:06:28 -0700 Subject: Shutdown stsetch2 SNF 2010-05-25 01:56:53: wafer broke inside the chamber Message-ID: Cleaned chamber. Cycled about 10 wafers with no problems ran the KY version 2 recipe twice. Both had 1 rf power drop out event. From mcvittie at snf.stanford.edu Wed May 26 18:04:17 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 26 May 2010 18:04:17 -0700 Subject: Shutdown stsetch2 SNF 2010-05-26 18:04:16: Need to replace 15V 0.5 A supply Message-ID: I shorted a small 15V supply while during measurements on the matching controller pcb. Should able to replace supply tomorrow. Jim From mcvittie at snf.stanford.edu Thu May 27 17:25:47 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 27 May 2010 17:25:47 -0700 Subject: Shutdown stsetch2 SNF 2010-05-26 18:04:16: Need to replace 15V 0.5 A supply Message-ID: We have a temporary 15V supply in place we until receive a replacement.. Jim From jjeong1 at snf.stanford.edu Mon May 31 09:21:49 2010 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Mon, 31 May 2010 09:21:49 -0700 Subject: Shutdown stsetch2 SNF 2010-05-31 09:21:49: Unload operation from the chamber failed Message-ID: I used carousel #2 and the machine couldn't unload a wafer from the chamber. The wafer slipped down during the transfer operation. It is sitting at the edge of chamber under one of wafer holding fingers. The wafer is not broken.