From srikantv at snf.stanford.edu Wed Sep 1 17:08:29 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Wed, 1 Sep 2010 17:08:29 -0700 Subject: Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber Message-ID: There was a software interlock error during start of etch. However, I managed to clear that error and etch. At the end of the etch the wafer is stuck inside the chamber. I believe system needs to be reset manually. From mcvittie at snf.stanford.edu Thu Sep 2 11:19:08 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 2 Sep 2010 11:19:08 -0700 Subject: Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber Message-ID: Reset loadlock. Jim From mtan at snf.stanford.edu Fri Sep 3 14:36:52 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 3 Sep 2010 14:36:52 -0700 Subject: Problem stsetch2 SNF 2010-09-03 14:36:52: numerous PMC1 coil alarm for smooth-shalloow recipe Message-ID: From mtan at snf.stanford.edu Sat Sep 4 14:49:44 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 4 Sep 2010 14:49:44 -0700 Subject: Comment stsetch2 SNF 2010-09-04 14:49:43: process ran smoothly Message-ID: less than 3 alarms during a 70 min run of smooth-shallow From eenriquez at snf.stanford.edu Tue Sep 7 14:20:04 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Sep 2010 14:20:04 -0700 Subject: Comment stsetch2 SNF 2010-09-07 14:20:04: Replaced lip seal Message-ID: From eenriquez at snf.stanford.edu Wed Sep 15 16:01:48 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 15 Sep 2010 16:01:48 -0700 Subject: Comment stsetch2 SNF 2010-09-15 16:01:47: Verified platen coolant temp Message-ID: Installed a thermocouple in the platen coolant input line. At a setpoint of 0 C, TC temp= 2. At a setpoint of 10 C, TC temp=11. From eenriquez at snf.stanford.edu Mon Sep 20 10:04:03 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 10:04:03 -0700 Subject: Shutdown stsetch2 SNF 2010-09-20 10:04:03: Replacing indium gasket Message-ID: Replacing the platen's indium gasket to improve wafer cooling. From eenriquez at snf.stanford.edu Mon Sep 20 14:52:31 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 14:52:31 -0700 Subject: Shutdown stsetch2 SNF 2010-09-20 10:04:03: Replacing indium gasket Message-ID: Replaced indium gaskets. System is heating up. From eenriquez at snf.stanford.edu Mon Sep 20 14:54:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 20 Sep 2010 14:54:47 -0700 Subject: Problem stsetch2 SNF 2010-09-20 14:54:46: Needs to be tested Message-ID: Replaced indium gasket but did not have to test the system. Please run an o2 plasma using a dummy wafer before qualifying your process. From ludwig at snf.stanford.edu Mon Sep 20 18:45:53 2010 From: ludwig at snf.stanford.edu (ludwig at snf.stanford.edu) Date: Mon, 20 Sep 2010 18:45:53 -0700 Subject: Problem stsetch2 SNF 2010-09-20 18:45:52: broken wafer inside the chamber Message-ID: Finished etching one wafer, after that the system did not return the etched wafer, tried to use manual mode, then it broke the wafer in the chamber. Sorry about that From srikantv at snf.stanford.edu Mon Sep 20 21:55:20 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 20 Sep 2010 21:55:20 -0700 Subject: Shutdown stsetch2 SNF 2010-09-20 21:55:20: previous user's broken pieces inside chamber Message-ID: Please shutdown tool if next user cannot use From eenriquez at snf.stanford.edu Tue Sep 21 12:06:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Sep 2010 12:06:43 -0700 Subject: Comment stsetch2 SNF 2010-09-21 12:06:43: Update broken wafer Message-ID: Cleaned the chamber and load lock. Looks like the broken wafer was caused by a defective wafer sensor. Ordered a new wafer sensor. It should be here by Thursday 9/23 From eenriquez at snf.stanford.edu Thu Sep 23 14:14:18 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:14:18 -0700 Subject: Comment stsetch2 SNF 2010-09-04 14:49:43: process ran smoothly Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 23 14:14:43 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:14:43 -0700 Subject: Problem stsetch2 SNF 2010-07-27 23:28:50: Recipe Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 23 14:15:15 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:15:15 -0700 Subject: Comment stsetch2 SNF 2010-07-12 14:11:28: Cover for LF supply pulse generator. Message-ID: archived From eenriquez at snf.stanford.edu Thu Sep 23 14:44:59 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:44:59 -0700 Subject: Shutdown stsetch2 SNF 2010-09-20 21:55:20: previous user's broken pieces inside chamber Message-ID: Replaced defective wafer sensor. Cycled 2 wafers using the Jim O2 recipe. From eenriquez at snf.stanford.edu Thu Sep 23 14:45:05 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:45:05 -0700 Subject: Comment stsetch2 SNF 2010-09-21 12:06:43: Update broken wafer Message-ID: Replaced defective wafer sensor. Cycled 2 wafers using the Jim O2 recipe. From eenriquez at snf.stanford.edu Thu Sep 23 14:45:10 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:45:10 -0700 Subject: Problem stsetch2 SNF 2010-09-20 18:45:52: broken wafer inside the chamber Message-ID: Replaced defective wafer sensor. Cycled 2 wafers using the Jim O2 recipe. From eenriquez at snf.stanford.edu Thu Sep 23 14:45:27 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:45:27 -0700 Subject: Problem stsetch2 SNF 2010-09-20 14:54:46: Needs to be tested Message-ID: Replaced defective wafer sensor. Cycled 2 wafers using the Jim O2 recipe. From eenriquez at snf.stanford.edu Thu Sep 23 14:46:16 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:46:16 -0700 Subject: Comment stsetch2 SNF 2010-09-07 14:20:04: Replaced lip seal Message-ID: Archived From eenriquez at snf.stanford.edu Thu Sep 23 14:46:25 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 23 Sep 2010 14:46:25 -0700 Subject: Comment stsetch2 SNF 2010-09-15 16:01:47: Verified platen coolant temp Message-ID: Archived From jjeong1 at snf.stanford.edu Thu Sep 23 18:23:39 2010 From: jjeong1 at snf.stanford.edu (jjeong1 at snf.stanford.edu) Date: Thu, 23 Sep 2010 18:23:39 -0700 Subject: Shutdown stsetch2 SNF 2010-09-23 18:23:39: Wafer broken in the chamber Message-ID: Tried to unload wafer from the chamber, but during the transfer operation, it was broken inside the chamber. Sorry about that. From eenriquez at snf.stanford.edu Fri Sep 24 13:27:58 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 24 Sep 2010 13:27:58 -0700 Subject: Shutdown stsetch2 SNF 2010-09-23 18:23:39: Wafer broken in the chamber Message-ID: Cleaned the chamber. Ran 2 wafers using the user's recipe (Olav SOI) with no problems. From mtan at snf.stanford.edu Fri Sep 24 17:14:04 2010 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 24 Sep 2010 17:14:04 -0700 Subject: Problem stsetch2 SNF 2010-09-24 17:14:04: transfer freeze glitches Message-ID: Process was fine, but beware of transfer errors. The machine froze a few times during transfer operations. The problems were resolved by hitting abort followed by unloading using manual mode. From eenriquez at snf.stanford.edu Mon Sep 27 13:10:57 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 27 Sep 2010 13:10:57 -0700 Subject: Problem stsetch2 SNF 2010-09-24 17:14:04: transfer freeze glitches Message-ID: Reset windows software. Cycled wafers with no problems From grahamab at snf.stanford.edu Mon Sep 27 18:58:15 2010 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 27 Sep 2010 18:58:15 -0700 Subject: Problem stsetch2 SNF 2010-09-27 18:58:15: poor resist selectivity Message-ID: Running my normal recipe for a normal amount of time and all photoresist has disappeared and ruined an SOI wafer. chamber was seasoned in same way as for previous wafers and recipe appears correct, but something obviously wasn't right. unfortunately, I wasn't monitoring the gas flows during the etch and have no idea what actually happened. From srikantv at snf.stanford.edu Tue Sep 28 22:12:10 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 28 Sep 2010 22:12:10 -0700 Subject: Shutdown stsetch2 SNF 2010-09-28 22:12:09: software frozen Message-ID: From eenriquez at snf.stanford.edu Wed Sep 29 11:09:47 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Sep 2010 11:09:47 -0700 Subject: Shutdown stsetch2 SNF 2010-09-28 22:12:09: software frozen Message-ID: Reset the computer. Ran 2 wafers with no problems. From eenriquez at snf.stanford.edu Wed Sep 29 16:04:33 2010 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 29 Sep 2010 16:04:33 -0700 Subject: Comment stsetch2 SNF 2010-09-29 16:04:32: Installed a flow meter Message-ID: Installed a flow meter in the electrode cooling line. The meter indicates a flow of 1.5 gpm. From mcvittie at snf.stanford.edu Thu Sep 30 18:01:57 2010 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 30 Sep 2010 18:01:57 -0700 Subject: Shutdown stsetch2 SNF 2010-09-30 18:01:56: Can not unload Wafer in Chamber Message-ID: Did full reset to get TC reading for heater to read correctly. After reset TC problem was done but could not get wafer to go into 2 wafer loader mode. Tried to reset loader but did not help. Jim