Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber

srikantv at srikantv at
Wed Sep 1 17:08:29 PDT 2010

There was a software interlock error during start of etch. However, I
managed to clear that error and etch. At the end of the etch the wafer is stuck inside the chamber. I believe system needs to be reset manually.

More information about the stsetch2-pcs mailing list