Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Wed Sep 1 17:08:29 PDT 2010


There was a software interlock error during start of etch. However, I
managed to clear that error and etch. At the end of the etch the wafer is stuck inside the chamber. I believe system needs to be reset manually.




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