Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber
mcvittie at snf.stanford.edu
mcvittie at snf.stanford.edu
Thu Sep 2 11:19:08 PDT 2010
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Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber
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Problem stsetch2 SNF 2010-09-03 14:36:52: numerous PMC1 coil alarm for smooth-shalloow recipe
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Reset loadlock. Jim
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Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber
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Problem stsetch2 SNF 2010-09-03 14:36:52: numerous PMC1 coil alarm for smooth-shalloow recipe
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