Problem stsetch2 SNF 2010-09-03 14:36:52: numerous PMC1 coil alarm for smooth-shalloow recipe
mtan at snf.stanford.edu
mtan at snf.stanford.edu
Fri Sep 3 14:36:52 PDT 2010
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Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber
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Comment stsetch2 SNF 2010-09-04 14:49:43: process ran smoothly
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Shutdown stsetch2 SNF 2010-09-01 17:08:29: wafer stuck inside chamber
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Comment stsetch2 SNF 2010-09-04 14:49:43: process ran smoothly
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