Shutdown stsetch2 SNF 2010-09-20 10:04:03: Replacing indium gasket

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 20 10:04:03 PDT 2010


Replacing the platen's indium gasket to improve wafer cooling.




More information about the stsetch2-pcs mailing list