Problem stsetch2 SNF 2010-09-20 14:54:46: Needs to be tested
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Sep 20 14:54:47 PDT 2010
Replaced indium gasket but did not have to test the system. Please run an o2 plasma using a dummy wafer before qualifying your process.
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