Problem stsetch2 SNF 2010-09-20 14:54:46: Needs to be tested

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Sep 20 14:54:47 PDT 2010


Replaced indium gasket but did not have to test the system.  Please run an o2 plasma using a dummy wafer before qualifying your process.




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