Problem stsetch2 SNF 2010-09-20 18:45:52: broken wafer inside the chamber

ludwig at snf.stanford.edu ludwig at snf.stanford.edu
Mon Sep 20 18:45:53 PDT 2010


Finished etching one wafer, after that the system did not return the etched wafer, tried to use manual mode, then it broke the wafer in the chamber. Sorry about that




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