Comment stsetch2 SNF 2010-09-21 12:06:43: Update broken wafer

eenriquez at eenriquez at
Tue Sep 21 12:06:43 PDT 2010

Cleaned the chamber and load lock.   Looks like the broken wafer was caused by a defective wafer sensor.  Ordered a new wafer sensor.  It should be here by Thursday 9/23

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