Shutdown stsetch2 SNF 2010-09-20 21:55:20: previous user's broken pieces inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Sep 23 14:44:59 PDT 2010


Replaced defective wafer sensor.  Cycled 2 wafers using the Jim O2 recipe.




More information about the stsetch2-pcs mailing list