Shutdown stsetch2 SNF 2010-09-20 21:55:20: previous user's broken pieces inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Thu Sep 23 14:44:59 PDT 2010

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Replaced defective wafer sensor.  Cycled 2 wafers using the Jim O2 recipe.

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