Shutdown stsetch2 SNF 2010-09-23 18:23:39: Wafer broken in the chamber

jjeong1 at snf.stanford.edu jjeong1 at snf.stanford.edu
Thu Sep 23 18:23:39 PDT 2010


Tried to unload wafer from the chamber, but during the transfer operation, it was broken inside the chamber. Sorry about that.




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