Shutdown stsetch2 SNF 2010-09-23 18:23:39: Wafer broken in the chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Sep 24 13:27:58 PDT 2010


Cleaned the chamber.  Ran 2 wafers using the user's recipe (Olav SOI) with no problems.




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