Problem stsetch2 SNF 2010-09-27 18:58:15: poor resist selectivity

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon Sep 27 18:58:15 PDT 2010


Running my normal recipe for a normal amount of time and all photoresist has disappeared and ruined an SOI wafer.  chamber was seasoned in same way as for previous wafers and recipe appears correct, but something obviously wasn't right.  unfortunately, I wasn't monitoring the gas flows during the etch and have no idea what actually happened.  




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