Shutdown stsetch2 SNF 2010-09-30 18:01:56: Can not unload Wafer in Chamber
mcvittie at snf.stanford.edu
mcvittie at snf.stanford.edu
Thu Sep 30 18:01:57 PDT 2010
Did full reset to get TC reading for heater to read correctly. After reset TC
problem was done but could not get wafer to go into 2 wafer loader
mode. Tried to reset loader but did not help. Jim
More information about the stsetch2-pcs
mailing list