Shutdown stsetch2 SNF 2010-09-30 18:01:56: Can not unload Wafer in Chamber

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Thu Sep 30 18:01:57 PDT 2010


Did full reset to get TC reading for heater to read correctly. After reset TC
problem was done but could not get wafer to go into 2 wafer loader 
mode. Tried to reset loader but did not help.   Jim 




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