From mdickey at snf.stanford.edu Mon Aug 1 09:13:54 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 1 Aug 2011 09:13:54 -0700 Subject: Comment stsetch2 SNF 2011-08-01 09:13:53: pumps Message-ID: Dry pumps are off From mcvittie at snf.stanford.edu Mon Aug 1 10:03:22 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Mon, 1 Aug 2011 10:03:22 -0700 Subject: Problem stsetch2 SNF 2011-08-01 10:03:22: Pumps are shutting down Message-ID: The pumps shut dw on Fri and again over the weekend. On starting them up again on Monday, the backing pump shut dw as the chamber was punping dw. There was no problem after the pumps were turned on again using pump to base command. This is intermittent problem which seems to be getting worst. There may be a loose connection to the backing pump into one of the connectors at the back of the PLC drawer in the basment since I have seen the backing pump shut dw when this drawer is pulled out and pushed back in. Jim From mtan at snf.stanford.edu Tue Aug 2 16:10:28 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 2 Aug 2011 16:10:28 -0700 Subject: Problem stsetch2 SNF 2011-08-02 16:10:28: not working Message-ID: recipes won't load tried kyjimetchtest-v2.0. reported interlock chain errors From cfchiang at snf.stanford.edu Wed Aug 3 10:10:19 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Wed, 3 Aug 2011 10:10:19 -0700 Subject: Shutdown stsetch2 SNF 2011-08-03 10:10:19: Software interlocks Message-ID: Probelm reported by previous user hasn't been addressed. System has a few system interlocks. From mcvittie at snf.stanford.edu Wed Aug 3 17:55:11 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 3 Aug 2011 17:55:11 -0700 Subject: Comment stsetch2 SNF 2011-08-03 17:55:11: Chiller flow Interlock problem Message-ID: Both chillers are having problems this week while Elmer is away. Chiller 1 (platen) is turning off by itself, and its set point at he chiller is going to 0C when setpoint on the user screen says 10C. For Chiller 2 (Antanna) we are getting a flow fault when there is flow. I suspect the chiller 1 problem is a communication fault while the chiller 2 problem maybe a flow switch problem. I will work on the problems again tomorrow but my feeling is that we may need to wait for Elmer to return. Jim From mcvittie at snf.stanford.edu Thu Aug 4 10:23:14 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 4 Aug 2011 10:23:14 -0700 Subject: Comment stsetch2 SNF 2011-08-04 10:23:13: STS2-Water Flow Interlock Problem Message-ID: A flow interlock on the source ICP coil is keeping the system down. The water flow rate is 0.25 GPM and the flow switch setting is also o.25 GPM. There is a good chance our problem is that the flow is too close to the interlock set point. To try and solve the proble, we are going to increase the diameter of plastic tubing which the water flow from the chiler in the basement to the tool. We going from 3/8" to 1/2". I am also going to go through the schematics to see were I might be able to directly measure the voltage across the flow switch. Jim From mcvittie at snf.stanford.edu Thu Aug 4 17:21:46 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 4 Aug 2011 17:21:46 -0700 Subject: Comment stsetch2 SNF 2011-08-04 17:21:46: STS2 -Regarding the coil chiller interlock problem Message-ID: The water flow switch is the issue. Using a different chiller, I was able to get the flow switch to flip when the flow was increased to 0.3 GPM. I can not leave this 2nd chiller on the tool since it is only rated for a 1Kw coolling capacity while we can put up to 3 Kw into the ICP coil. We have ordered larger diameter plastic to decrease water line resistance and thus increase the flow. The manual says that the chiller has a internal pressure relief regular which controls the output pressure. Tomorrow, I will see if we can get at that regulator to increase the chille output opressure and thus increase flow. For the testing I did with the substitute chiller, I found 30psi was needed to get the 0.3 GPM flow. Jim From mcvittie at snf.stanford.edu Fri Aug 5 18:50:30 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 5 Aug 2011 18:50:30 -0700 Subject: Shutdown stsetch2 SNF 2011-08-03 10:10:19: Software interlocks Message-ID: The chiller for the ICP coil and matching has bad corrosion is some of the internal parts ( relief valve and probably the water pump) which has lowered its coolant (water) flow rate. I was not able to get the flow high enough to flip the flow switch. I did try a new flow switch but it had the same problem. For now I hooked up a 2nd chiller which can put out the needed flow to turn off the interlock fault so STS2 can be run. The corrosion is from flowing DI water through a chiller made of brass copper internal parts. We are going need to either order replacement stainless steel parts (relief valve and pump) or send the unit out to have the corroded parts replaced. Jim From mcvittie at snf.stanford.edu Sat Aug 6 17:50:44 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sat, 6 Aug 2011 17:50:44 -0700 Subject: Problem stsetch2 SNF 2011-08-06 17:50:43: STS2- DeviceNet 9 (platen chiller ) Comm Problem Message-ID: The platen chillen has a commication problem. It is defaulting to 0C. Jim From eenriquez at snf.stanford.edu Mon Aug 8 09:35:48 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Aug 2011 09:35:48 -0700 Subject: Shutdown stsetch2 SNF 2011-08-08 09:35:48: Device net 9 comm problem Message-ID: From eenriquez at snf.stanford.edu Tue Aug 9 10:16:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 9 Aug 2011 10:16:41 -0700 Subject: Shutdown stsetch2 SNF 2011-08-08 09:35:48: Device net 9 comm problem Message-ID: Reset the device net but the comm problem with node 9 did not go away. The system is still operational but you will not be able to control the platten temperature through the software. The platten temperature can only be changed manually. The platten chiller is currently set at 10 C. From cfchiang at snf.stanford.edu Tue Aug 9 12:33:39 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Tue, 9 Aug 2011 12:33:39 -0700 Subject: Comment stsetch2 SNF 2011-08-09 12:33:39: wafer came out not centered Message-ID: Processed 4 wafers. The first three worked well. The last wafer came out but was not properly centered on the arm. From grahamab at snf.stanford.edu Fri Aug 12 08:31:35 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 12 Aug 2011 08:31:35 -0700 Subject: Problem stsetch2 SNF 2011-08-12 08:31:34: residue on wafer backside Message-ID: Noticed this on all wafers. Showed Elmer one of the wafers so he would know what it looked like rather than trying to describe it here. From eenriquez at snf.stanford.edu Fri Aug 12 15:00:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 12 Aug 2011 15:00:21 -0700 Subject: Comment stsetch2 SNF 2011-08-12 15:00:20: Update residue Message-ID: Ran a wafer and verified residue on the wafer. Will clean the electrode on Monday. From eenriquez at snf.stanford.edu Mon Aug 15 14:21:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 14:21:28 -0700 Subject: Comment stsetch2 SNF 2011-08-12 15:00:20: Update residue Message-ID: Archived From eenriquez at snf.stanford.edu Mon Aug 15 14:25:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 15 Aug 2011 14:25:46 -0700 Subject: Problem stsetch2 SNF 2011-08-12 08:31:34: residue on wafer backside Message-ID: Cleaned the electrode. Found a heavy deposit of a clear film on the electrode. The film came off easily when I wiped it with acetone. Ran an O2 plasma for 10 min. From mcvittie at snf.stanford.edu Thu Aug 18 09:55:39 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 18 Aug 2011 09:55:39 -0700 Subject: Shutdown stsetch2 SNF 2011-08-18 09:55:39: Changing DI Water Cart Message-ID: The DI water cooling the ICP coil has a resistivity below 1 Megohm-cm. I am shutting down the tool down while I change the DI cart. This should take less than 1/2 half hr. Jim From mcvittie at snf.stanford.edu Thu Aug 18 10:27:46 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 18 Aug 2011 10:27:46 -0700 Subject: Shutdown stsetch2 SNF 2011-08-18 09:55:39: Changing DI Water Cart Message-ID: Cooling water resistivity is back up over 1 megohm. Jim From mtan at snf.stanford.edu Sun Aug 21 14:26:11 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 21 Aug 2011 14:26:11 -0700 Subject: Problem stsetch2 SNF 2011-08-21 14:26:11: multiple chain and interlock erros Message-ID: From mtan at snf.stanford.edu Sun Aug 21 14:37:30 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 21 Aug 2011 14:37:30 -0700 Subject: Problem stsetch2 SNF 2011-08-21 14:37:29: valving errors? Message-ID: The process would start for a few seconds and then the plasma would shut off with a series of error messages. ky-jim test2 was used. From mtan at snf.stanford.edu Sun Aug 21 16:46:10 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 21 Aug 2011 16:46:10 -0700 Subject: Problem stsetch2 SNF 2011-08-21 16:46:10: pump to base problem Message-ID: S From mtan at snf.stanford.edu Sun Aug 21 17:52:08 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sun, 21 Aug 2011 17:52:08 -0700 Subject: Problem stsetch2 SNF 2011-08-21 17:52:08: machine is not stable Message-ID: etch was stopped by several alarms 10 minutes into the process. The same run also had problems when the machine was trying to remove the wafer from the chamber. The machine can get stuck at the the pump down to base routine forever. Aborting it and restart the process may provide a temporary solutiont to this problem. From mtan at snf.stanford.edu Mon Aug 22 15:38:06 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Mon, 22 Aug 2011 15:38:06 -0700 Subject: Problem stsetch2 SNF 2011-08-22 15:38:06: flow alarm again (same as yesterday) Message-ID: From mtan at snf.stanford.edu Tue Aug 23 12:11:24 2011 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Tue, 23 Aug 2011 12:11:24 -0700 Subject: Problem stsetch2 SNF 2011-08-23 12:11:24: got the same alarm error as yesterday. Process stopped 20 seconds after the plasma starts Message-ID: From eenriquez at snf.stanford.edu Tue Aug 23 12:37:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 23 Aug 2011 12:37:58 -0700 Subject: Comment stsetch2 SNF 2011-08-23 12:37:58: Update pump/flow alarms Message-ID: Found the turbo backing pump's N2 flow was borderline. Adjusted the flow and ran KY test ver.2 for 10 min twice and 45 min one time with no problems. From eenriquez at snf.stanford.edu Fri Aug 26 07:54:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:54:27 -0700 Subject: Comment stsetch2 SNF 2011-07-21 16:22:43: STS2-- New Indium Gaskets Under Chuck Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 26 07:54:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:54:34 -0700 Subject: Comment stsetch2 SNF 2011-07-26 15:05:13: High helium leak rate Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 26 07:57:05 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:57:05 -0700 Subject: Comment stsetch2 SNF 2011-08-01 09:13:53: pumps Message-ID: Turned pumps back on From eenriquez at snf.stanford.edu Fri Aug 26 07:58:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:58:03 -0700 Subject: Problem stsetch2 SNF 2011-08-01 10:03:22: Pumps are shutting down Message-ID: Turned up the n2 pump purge. From eenriquez at snf.stanford.edu Fri Aug 26 07:59:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:59:36 -0700 Subject: Problem stsetch2 SNF 2011-08-21 14:26:11: multiple chain and interlock erros Message-ID: Pump N2 purge was borderline and was intermittently shutting down the pump. Increased the N2 purge. From eenriquez at snf.stanford.edu Fri Aug 26 07:59:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:59:42 -0700 Subject: Problem stsetch2 SNF 2011-08-21 14:37:29: valving errors? Message-ID: Pump N2 purge was borderline and was intermittently shutting down the pump. Increased the N2 purge. From eenriquez at snf.stanford.edu Fri Aug 26 07:59:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:59:47 -0700 Subject: Problem stsetch2 SNF 2011-08-21 16:46:10: pump to base problem Message-ID: Pump N2 purge was borderline and was intermittently shutting down the pump. Increased the N2 purge. From eenriquez at snf.stanford.edu Fri Aug 26 07:59:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:59:51 -0700 Subject: Problem stsetch2 SNF 2011-08-21 17:52:08: machine is not stable Message-ID: Pump N2 purge was borderline and was intermittently shutting down the pump. Increased the N2 purge. From eenriquez at snf.stanford.edu Fri Aug 26 07:59:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 07:59:58 -0700 Subject: Problem stsetch2 SNF 2011-08-22 15:38:06: flow alarm again (same as yesterday) Message-ID: Pump N2 purge was borderline and was intermittently shutting down the pump. Increased the N2 purge. From eenriquez at snf.stanford.edu Fri Aug 26 08:00:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 08:00:21 -0700 Subject: Comment stsetch2 SNF 2011-06-22 11:01:04: ran three wafers without issue Message-ID: Archived From eenriquez at snf.stanford.edu Fri Aug 26 08:02:02 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 26 Aug 2011 08:02:02 -0700 Subject: Problem stsetch2 SNF 2011-07-28 00:52:39: Sofware interlock error Message-ID: Cleared water interlock problem. From eenriquez at snf.stanford.edu Tue Aug 30 09:14:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Aug 2011 09:14:32 -0700 Subject: Shutdown stsetch2 SNF 2011-08-30 09:14:31: High helium leak rate Message-ID: From eenriquez at snf.stanford.edu Tue Aug 30 14:52:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 30 Aug 2011 14:52:35 -0700 Subject: Shutdown stsetch2 SNF 2011-08-30 09:14:31: High helium leak rate Message-ID: Replaced wafer lip seal and ran an O2 plasma. From eenriquez at snf.stanford.edu Wed Aug 31 14:48:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Aug 2011 14:48:16 -0700 Subject: Shutdown stsetch2 SNF 2011-08-31 14:48:15: No process gas flow Message-ID: From eenriquez at snf.stanford.edu Wed Aug 31 15:36:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Aug 2011 15:36:47 -0700 Subject: Shutdown stsetch2 SNF 2011-08-31 14:48:15: No process gas flow Message-ID: Reset device net node 8. From eenriquez at snf.stanford.edu Wed Aug 31 16:02:31 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 31 Aug 2011 16:02:31 -0700 Subject: Comment stsetch2 SNF 2011-08-31 16:02:30: Update devicenet node 9 problem Message-ID: Found a defective devicenet tee. Ordered a new tee.