Problem stsetch2 SNF 2011-08-12 08:31:34: residue on wafer backside

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 15 14:25:46 PDT 2011


Cleaned the electrode.  Found a heavy deposit of a clear film on the electrode.  The film came off easily when I wiped it with acetone.  
Ran an O2 plasma for 10 min.




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