Problem stsetch2 SNF 2011-08-21 17:52:08: machine is not stable

mtan at snf.stanford.edu mtan at snf.stanford.edu
Sun Aug 21 17:52:08 PDT 2011


etch was stopped by several alarms 10 minutes into the process.  The same run also had problems when the machine was trying to remove the wafer from the chamber.  
The machine can get stuck at the the pump down to base routine forever.  Aborting it and restart the process may provide a temporary solutiont to this problem.




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