Problem stsetch2 SNF 2011-07-28 00:52:39: Sofware interlock error
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Aug 26 08:02:02 PDT 2011
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Comment stsetch2 SNF 2011-06-22 11:01:04: ran three wafers without issue
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Shutdown stsetch2 SNF 2011-08-30 09:14:31: High helium leak rate
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Cleared water interlock problem.
Previous message:
Comment stsetch2 SNF 2011-06-22 11:01:04: ran three wafers without issue
Next message:
Shutdown stsetch2 SNF 2011-08-30 09:14:31: High helium leak rate
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