August 2011 Archives by thread

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Starting: Mon Aug 1 09:13:54 PDT 2011
Ending: Wed Aug 31 16:02:31 PDT 2011
Messages: 41

• Comment stsetch2 SNF 2011-08-01 09:13:53: pumps   mdickey at snf.stanford.edu
  • Comment stsetch2 SNF 2011-08-01 09:13:53: pumps   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-01 10:03:22: Pumps are shutting down   mcvittie at snf.stanford.edu
  • Problem stsetch2 SNF 2011-08-01 10:03:22: Pumps are shutting down   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-02 16:10:28: not working   mtan at snf.stanford.edu
• Shutdown stsetch2 SNF 2011-08-03 10:10:19: Software interlocks   cfchiang at snf.stanford.edu
  • Shutdown stsetch2 SNF 2011-08-03 10:10:19: Software interlocks   mcvittie at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-03 17:55:11: Chiller flow Interlock problem   mcvittie at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-04 10:23:13: STS2-Water Flow Interlock Problem   mcvittie at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-04 17:21:46: STS2 -Regarding the coil chiller interlock problem   mcvittie at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-06 17:50:43: STS2- DeviceNet 9 (platen chiller ) Comm Problem   mcvittie at snf.stanford.edu
• Shutdown stsetch2 SNF 2011-08-08 09:35:48: Device net 9 comm problem   eenriquez at snf.stanford.edu
  • Shutdown stsetch2 SNF 2011-08-08 09:35:48: Device net 9 comm problem   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-09 12:33:39: wafer came out not centered   cfchiang at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-12 08:31:34: residue on wafer backside   grahamab at snf.stanford.edu
  • Problem stsetch2 SNF 2011-08-12 08:31:34: residue on wafer backside   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-12 15:00:20: Update residue   eenriquez at snf.stanford.edu
  • Comment stsetch2 SNF 2011-08-12 15:00:20: Update residue   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2011-08-18 09:55:39: Changing DI Water Cart   mcvittie at snf.stanford.edu
  • Shutdown stsetch2 SNF 2011-08-18 09:55:39: Changing DI Water Cart   mcvittie at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-21 14:26:11: multiple chain and interlock erros   mtan at snf.stanford.edu
  • Problem stsetch2 SNF 2011-08-21 14:26:11: multiple chain and interlock erros   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-21 14:37:29: valving errors?   mtan at snf.stanford.edu
  • Problem stsetch2 SNF 2011-08-21 14:37:29: valving errors?   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-21 16:46:10: pump to base problem   mtan at snf.stanford.edu
  • Problem stsetch2 SNF 2011-08-21 16:46:10: pump to base problem   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-21 17:52:08: machine is not stable   mtan at snf.stanford.edu
  • Problem stsetch2 SNF 2011-08-21 17:52:08: machine is not stable   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-22 15:38:06: flow alarm again (same as yesterday)   mtan at snf.stanford.edu
  • Problem stsetch2 SNF 2011-08-22 15:38:06: flow alarm again (same as yesterday)   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-08-23 12:11:24: got the same alarm error as yesterday. Process stopped 20 seconds after the plasma starts   mtan at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-23 12:37:58: Update pump/flow alarms   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-07-21 16:22:43: STS2-- New Indium Gaskets Under Chuck   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-07-26 15:05:13: High helium leak rate   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-06-22 11:01:04: ran three wafers without issue   eenriquez at snf.stanford.edu
• Problem stsetch2 SNF 2011-07-28 00:52:39: Sofware interlock error   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2011-08-30 09:14:31: High helium leak rate   eenriquez at snf.stanford.edu
  • Shutdown stsetch2 SNF 2011-08-30 09:14:31: High helium leak rate   eenriquez at snf.stanford.edu
• Shutdown stsetch2 SNF 2011-08-31 14:48:15: No process gas flow   eenriquez at snf.stanford.edu
  • Shutdown stsetch2 SNF 2011-08-31 14:48:15: No process gas flow   eenriquez at snf.stanford.edu
• Comment stsetch2 SNF 2011-08-31 16:02:30: Update devicenet node 9 problem   eenriquez at snf.stanford.edu

Last message date: Wed Aug 31 16:02:31 PDT 2011
Archived on: Sun Dec 23 09:23:25 PST 2012

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