From eldwin at snf.stanford.edu Mon Dec 5 02:14:33 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Mon, 5 Dec 2011 02:14:33 -0800 Subject: Problem stsetch2 SNF 2011-12-05 02:14:32: program crashed, need password to log in Message-ID: computer program had an error regarding setup file and exited. Need password to relog in. From eenriquez at snf.stanford.edu Mon Dec 5 09:07:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2011 09:07:09 -0800 Subject: Problem stsetch2 SNF 2011-12-05 02:14:32: program crashed, need password to log in Message-ID: Restarted the program. From grahamab at snf.stanford.edu Mon Dec 5 10:47:41 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Mon, 5 Dec 2011 10:47:41 -0800 Subject: Shutdown stsetch2 SNF 2011-12-05 10:47:40: RF generator repeatedly faulting Message-ID: Elmer tried to reset in the basement, but it tripped again on the first try. From eenriquez at snf.stanford.edu Tue Dec 6 15:10:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 6 Dec 2011 15:10:41 -0800 Subject: Comment stsetch2 SNF 2011-12-06 15:10:41: Update Message-ID: RF generator needs to be replace. We are currently installing the spare generator. We will test it tomorrow. From eenriquez at snf.stanford.edu Thu Dec 8 16:01:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Dec 2011 16:01:32 -0800 Subject: Shutdown stsetch2 SNF 2011-12-05 10:47:40: RF generator repeatedly faulting Message-ID: Replaced the RF generator. Currently testing and qualifying the SOI recipe. We will release it by 6:00pm From eenriquez at snf.stanford.edu Thu Dec 8 16:01:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Dec 2011 16:01:39 -0800 Subject: Comment stsetch2 SNF 2011-12-06 15:10:41: Update Message-ID: Archived From grahamab at snf.stanford.edu Thu Dec 8 18:11:37 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 8 Dec 2011 18:11:37 -0800 Subject: Comment stsetch2 SNF 2011-12-08 18:11:36: etch test Message-ID: running and SOI recipe, etch profile and etch rate appears very similar to before the RF generator went out. would still advise running a test wafer to be safe. From npapte at snf.stanford.edu Sat Dec 10 17:36:57 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sat, 10 Dec 2011 17:36:57 -0800 Subject: Problem stsetch2 SNF 2011-12-10 17:36:57: turbo pump not coming up to speed Message-ID: turbo pump not coming up to speed... tried several attempts From npapte at snf.stanford.edu Sun Dec 11 14:06:01 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 11 Dec 2011 14:06:01 -0800 Subject: Problem stsetch2 SNF 2011-12-11 14:06:01: RF generator software interlock error Message-ID: 13 MHz coil & platen won't start due to an active software interlock. Retried after clearing exception for 5-6 times, keep getting the same error From mcvittie at snf.stanford.edu Sun Dec 11 16:23:12 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sun, 11 Dec 2011 16:23:12 -0800 Subject: Problem stsetch2 SNF 2011-12-11 16:23:12: Antanna Chiller Flow Switch Fault Message-ID: The process will not run. The bottom green arrow on the PM screen is not coming on. It has a flow fault for the cooling water going to the antanna. Tried turning off and on the chiller. Also opened and closed the coonectors on this cooling line. I expect the fault is because the chiller has marginal flow and needed to be rebuilt. This an old problem. Jim From eenriquez at snf.stanford.edu Mon Dec 12 09:59:50 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 09:59:50 -0800 Subject: Problem stsetch2 SNF 2011-12-11 16:23:12: Antanna Chiller Flow Switch Fault Message-ID: Reset the chiller pump/compressor From eenriquez at snf.stanford.edu Mon Dec 12 10:00:19 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 10:00:19 -0800 Subject: Problem stsetch2 SNF 2011-12-11 14:06:01: RF generator software interlock error Message-ID: Reset the chiller pump/compressor From eenriquez at snf.stanford.edu Mon Dec 12 10:00:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 10:00:52 -0800 Subject: Problem stsetch2 SNF 2011-12-10 17:36:57: turbo pump not coming up to speed Message-ID: Water to the turbo has been restored. From npapte at snf.stanford.edu Tue Dec 13 03:40:27 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Tue, 13 Dec 2011 03:40:27 -0800 Subject: Comment stsetch2 SNF 2011-12-13 03:40:27: broken wafer Message-ID: wafer broke during etch. some wafer pieces still inside chamber From latta at snf.stanford.edu Thu Dec 15 16:13:53 2011 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 15 Dec 2011 16:13:53 -0800 Subject: Shutdown stsetch2 SNF 2011-12-15 16:13:53: for renovation Message-ID: