Comment stsetch2 SNF 2011-12-08 18:11:36: etch test

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Dec 8 18:11:37 PST 2011


running and SOI recipe, etch profile and etch rate appears very similar to before the RF generator went out.  would still advise running a test wafer to be safe.




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