Comment stsetch2 SNF 2011-12-13 03:40:27: broken wafer

npapte at snf.stanford.edu npapte at snf.stanford.edu
Tue Dec 13 03:40:27 PST 2011

Previous message: Problem stsetch2 SNF 2011-12-11 16:23:12: Antanna Chiller Flow Switch Fault
Next message: Shutdown stsetch2 SNF 2011-12-15 16:13:53: for renovation
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

wafer broke during etch. some wafer pieces still inside chamber

Previous message: Problem stsetch2 SNF 2011-12-11 16:23:12: Antanna Chiller Flow Switch Fault
Next message: Shutdown stsetch2 SNF 2011-12-15 16:13:53: for renovation
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the stsetch2-pcs mailing list