From mislam at snf.stanford.edu Tue Feb 1 01:12:16 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 1 Feb 2011 01:12:16 -0800 Subject: Problem stsetch2 SNF 2011-02-01 01:12:15: coil generator software interlock fault Message-ID: Plasam won't start, faulted for software iterlock. Retried few time, same result. From srikantv at snf.stanford.edu Tue Feb 1 16:15:23 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 1 Feb 2011 16:15:23 -0800 Subject: Shutdown stsetch2 SNF 2011-02-01 16:15:22: Generator software interlock chain is active Message-ID: unable to run O2 clean on dummy wafer perhaps cooling problem? From mcvittie at snf.stanford.edu Wed Feb 2 12:18:58 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Wed, 2 Feb 2011 12:18:58 -0800 Subject: Problem stsetch2 SNF 2011-02-02 12:18:57: STS2 -- Platen chiller will not stay on. Jim Message-ID: From cbaxter at snf.stanford.edu Wed Feb 2 17:08:43 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 2 Feb 2011 17:08:43 -0800 Subject: Comment stsetch2 SNF 2011-02-02 17:08:41: Chiller#2 Message-ID: Chiller is primed and running. JimV is going to test the tool. From cbaxter at snf.stanford.edu Wed Feb 2 17:09:16 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 2 Feb 2011 17:09:16 -0800 Subject: Problem stsetch2 SNF 2011-02-02 12:18:57: STS2 -- Platen chiller will not stay on. Jim Message-ID: Chiller#2 is running now.. From eenriquez at snf.stanford.edu Thu Feb 3 10:10:59 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Feb 2011 10:10:59 -0800 Subject: Comment stsetch2 SNF 2011-02-02 17:08:41: Chiller#2 Message-ID: Archived From eenriquez at snf.stanford.edu Thu Feb 3 10:12:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Feb 2011 10:12:47 -0800 Subject: Shutdown stsetch2 SNF 2011-02-01 16:15:22: Generator software interlock chain is active Message-ID: Reset the device net. Pumped and heated up the system. Ran O2 plasma and KY ver 2 recipe. From cbaxter at snf.stanford.edu Thu Feb 3 17:05:06 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 3 Feb 2011 17:05:06 -0800 Subject: Problem stsetch2 SNF 2011-02-01 01:12:15: coil generator software interlock fault Message-ID: From srikantv at snf.stanford.edu Sat Feb 19 22:33:18 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Sat, 19 Feb 2011 22:33:18 -0800 Subject: Problem stsetch2 SNF 2011-02-19 22:33:17: leack check faiiling Message-ID: I can see a broken piece in chamber that is causing leak check to fail From srikantv at snf.stanford.edu Mon Feb 21 22:26:56 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Mon, 21 Feb 2011 22:26:56 -0800 Subject: Shutdown stsetch2 SNF 2011-02-21 22:26:56: leak fail Message-ID: broken piece still in chamber From mcvittie at snf.stanford.edu Tue Feb 22 10:48:48 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 22 Feb 2011 10:48:48 -0800 Subject: Shutdown stsetch2 SNF 2011-02-21 22:26:56: leak fail Message-ID: Chip in chamber on wafer seal. Opened chamber, removed chip, replaced wafer seal and vacuumed chamber. From mcvittie at snf.stanford.edu Tue Feb 22 10:51:31 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 22 Feb 2011 10:51:31 -0800 Subject: Problem stsetch2 SNF 2011-02-22 10:51:31: Sticky roughing valve Message-ID: During chamber pump dowm from atmoshpere, roughing valve was not oping and closing properly. Solved problem by taping on valve. I suspect the valve needs to be cleaned. From mcvittie at snf.stanford.edu Tue Feb 22 11:30:55 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Tue, 22 Feb 2011 11:30:55 -0800 Subject: Shutdown stsetch2 SNF 2011-02-22 11:30:55: Still Failing Backside Leak Test Message-ID: We will have open the chamber again. Jim From eenriquez at snf.stanford.edu Wed Feb 23 15:53:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Feb 2011 15:53:41 -0800 Subject: Shutdown stsetch2 SNF 2011-02-22 11:30:55: Still Failing Backside Leak Test Message-ID: Replaced lip seal. Leak rate is about 22 mt/min. Ran O2 plasma with no problems. From eenriquez at snf.stanford.edu Wed Feb 23 15:54:26 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 23 Feb 2011 15:54:26 -0800 Subject: Problem stsetch2 SNF 2011-02-19 22:33:17: leack check faiiling Message-ID: Replaced lip seal. Leak rate is about 22 mt/min. Ran O2 plasma with no problems. From mislam at snf.stanford.edu Wed Feb 23 21:18:15 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 23 Feb 2011 21:18:15 -0800 Subject: Problem stsetch2 SNF 2011-02-23 21:18:15: Load arm error Message-ID: Load arm did not load wafer but chmaber shows a wafer loaded. could not unload the phantom wafer. There is no wafer in the chamber. From srikantv at snf.stanford.edu Wed Feb 23 23:37:51 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Wed, 23 Feb 2011 23:37:51 -0800 Subject: Shutdown stsetch2 SNF 2011-02-23 23:37:50: unable to load wafer Message-ID: load arm does not work. cleared phantom wafer from previous user. Problem still persists From eenriquez at snf.stanford.edu Thu Feb 24 14:40:43 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Feb 2011 14:40:43 -0800 Subject: Comment stsetch2 SNF 2011-02-24 14:40:42: Update Message-ID: Loader arm drive motor is too slow. Need to replace. Ordered a new motor. Should be here by next Wednesday.