Problem stsetch2 SNF 2011-02-23 21:18:15: Load arm error

mislam at mislam at
Wed Feb 23 21:18:15 PST 2011

Load arm did not load wafer but chmaber shows a wafer loaded. could not unload the phantom wafer. There is no wafer in the chamber.

More information about the stsetch2-pcs mailing list