Problem stsetch2 SNF 2011-02-23 21:18:15: Load arm error

mislam at snf.stanford.edu mislam at snf.stanford.edu
Wed Feb 23 21:18:15 PST 2011


Load arm did not load wafer but chmaber shows a wafer loaded. could not unload the phantom wafer. There is no wafer in the chamber.




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