Shutdown stsetch2 SNF 2011-01-04 15:12:44: Vacuum is pump not staying on.

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jan 5 14:34:19 PST 2011


Adjusted pump purge.  Ran O2 plasma and KY soi ver2 recipe several times without any problems.




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