Shutdown stsetch2 SNF 2011-07-10 17:54:34: wafer stuck, high leak rate >10 mT/min

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Sun Jul 10 17:54:34 PDT 2011


Interlock error: Coil enclosure electrode cover open
Can we also replace the O-ring, as the leak rate is consistently high, even for new prime wafers.




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