Shutdown stsetch2 SNF 2011-07-10 17:54:34: wafer stuck, high leak rate >10 mT/min

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Jul 11 09:58:49 PDT 2011


Recovered the user's wafer.  Found the wafer stuck to the lip seal.  Replaced the lip seal and ran O2 clean.




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