Shutdown stsetch2 SNF 2011-07-11 16:37:28: wafer broke inside chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jul 13 14:11:09 PDT 2011


Recovered the wafer.  Replaced the electrode ceramic shield and ran O2 plasma.




More information about the stsetch2-pcs mailing list