Comment stsetch2 SNF 2011-07-21 16:22:43: STS2-- New Indium Gaskets Under Chuck

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Thu Jul 21 16:22:44 PDT 2011


After much effort I final I got STS to sell me a set of the proper indium gaskets for our tool. This afternoon I installed the new gaskets. On Mondsay, I will do on wafer temperature tests to see if the new gaskets have bought the temperature down to within the tool spects (Tw < 71C during 15 min running the temperature test recipe).
    Jim 




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