Problem stsetch2 SNF 2011-07-28 17:15:08: unload problem and backing pump problem

srikantv at snf.stanford.edu srikantv at snf.stanford.edu
Thu Jul 28 17:15:09 PDT 2011


1) After every etch, during unload, the wafer is not properly seated on  carousel. This only happens after clamping and declamping
2) Repeated backing pump problems




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