From grahamab at snf.stanford.edu Wed Jun 1 11:37:39 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 1 Jun 2011 11:37:39 -0700 Subject: Shutdown stsetch2 SNF 2011-06-01 11:37:37: backing pump repeatedly turning off Message-ID: backing pump shutting down in the middle of etches/unloading/etc. Elmer made an adjustment to the pump in the basement, but problem returned a few etches later. From eenriquez at snf.stanford.edu Wed Jun 1 19:28:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 1 Jun 2011 19:28:30 -0700 Subject: Comment stsetch2 SNF 2011-06-01 19:28:29: Update backing pump Message-ID: Need to rebuild the vacuum pump. System should be ready by noon on Friday 6/3 From eenriquez at snf.stanford.edu Fri Jun 3 11:28:06 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Jun 2011 11:28:06 -0700 Subject: Shutdown stsetch2 SNF 2011-06-01 11:37:37: backing pump repeatedly turning off Message-ID: Installed rebuilt pump package. Ran O2 plasma and SOI recipe with no problems. From eenriquez at snf.stanford.edu Fri Jun 3 11:28:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Jun 2011 11:28:14 -0700 Subject: Comment stsetch2 SNF 2011-06-01 19:28:29: Update backing pump Message-ID: Archived From srikantv at snf.stanford.edu Fri Jun 3 18:24:20 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Fri, 3 Jun 2011 18:24:20 -0700 Subject: Problem stsetch2 SNF 2011-06-03 18:24:19: temp sensor is off Message-ID: The platen chiller temperature shows 20deg C, but the external temperature sensor from Jim shows around 12degC From grahamab at snf.stanford.edu Thu Jun 9 17:17:27 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 9 Jun 2011 17:17:27 -0700 Subject: Problem stsetch2 SNF 2011-06-09 17:17:26: platen temperature not working properly Message-ID: the platen temperature is still not working properly. the interface still shows 20C no matter what is specificed in the recipe. From eenriquez at snf.stanford.edu Mon Jun 13 11:46:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 13 Jun 2011 11:46:44 -0700 Subject: Problem stsetch2 SNF 2011-06-09 17:17:26: platen temperature not working properly Message-ID: Reset the heat exchanger From eenriquez at snf.stanford.edu Fri Jun 17 09:53:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:53:13 -0700 Subject: Problem stsetch2 SNF 2011-06-03 18:24:19: temp sensor is off Message-ID: Temp ok after the the heat exchanger was reset. From eenriquez at snf.stanford.edu Fri Jun 17 09:53:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:53:27 -0700 Subject: Comment stsetch2 SNF 2011-03-24 14:54:21: Update chunck not cooling Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 17 09:53:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:53:35 -0700 Subject: Comment stsetch2 SNF 2011-04-07 15:06:02: Update chuck temperature Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 17 09:53:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:53:40 -0700 Subject: Comment stsetch2 SNF 2011-04-22 14:19:28: Update chuck temperature Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 17 09:53:45 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:53:45 -0700 Subject: Comment stsetch2 SNF 2011-05-11 15:26:40: Update chuck temp Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 17 09:53:50 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:53:50 -0700 Subject: Comment stsetch2 SNF 2011-04-29 15:11:41: Update chuck temperature Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 17 09:54:00 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:54:00 -0700 Subject: Comment stsetch2 SNF 2011-05-28 12:30:05: Solved STS2 Wafer Temperature Problem Message-ID: Archived From eenriquez at snf.stanford.edu Fri Jun 17 09:54:05 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 17 Jun 2011 09:54:05 -0700 Subject: Comment stsetch2 SNF 2011-05-18 17:15:23: Grass Problem Message-ID: Archived From hsyoon at snf.stanford.edu Mon Jun 20 15:04:44 2011 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Mon, 20 Jun 2011 15:04:44 -0700 Subject: Shutdown stsetch2 SNF 2011-06-20 15:04:43: wafer broken Message-ID: I think wafer is broken inside the chamber during 15 min seasoning. I saw alarm message about BSG pressure. the wafer does not come out after aborting. From eenriquez at snf.stanford.edu Tue Jun 21 11:03:36 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 21 Jun 2011 11:03:36 -0700 Subject: Shutdown stsetch2 SNF 2011-06-20 15:04:43: wafer broken Message-ID: Cleaned the chamber and replaced the lip seal. Ran O2 plasma for 10 min. From hsyoon at snf.stanford.edu Tue Jun 21 18:20:49 2011 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Tue, 21 Jun 2011 18:20:49 -0700 Subject: Shutdown stsetch2 SNF 2011-06-21 18:20:48: wafer broken again Message-ID: wafer broken during the etching. I take the wafer out but one of the big piece is still inside the chamber. From grahamab at snf.stanford.edu Wed Jun 22 11:01:05 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 22 Jun 2011 11:01:05 -0700 Subject: Comment stsetch2 SNF 2011-06-22 11:01:04: ran three wafers without issue Message-ID: ran three wafers with no problems. From eenriquez at snf.stanford.edu Wed Jun 22 11:03:23 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 22 Jun 2011 11:03:23 -0700 Subject: Shutdown stsetch2 SNF 2011-06-21 18:20:48: wafer broken again Message-ID: Recovered the two wafer pieces left in the chamber. Ran O2 plasma for 10 minutes and cycled wafers in and out with no problems. From mcvittie at snf.stanford.edu Thu Jun 30 14:35:35 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Thu, 30 Jun 2011 14:35:35 -0700 Subject: Problem stsetch2 SNF 2011-06-30 14:35:34: Chamber Heater stops at 100C setpt = 120C Message-ID: Even though the setpoint is 120C and the power out is 100% both TCs say the temperature is 100C. It is the same as it was 24Hrs ago. There is clearly a problem. Jim