Shutdown stsetch2 SNF 2011-06-20 15:04:43: wafer broken

hsyoon at snf.stanford.edu hsyoon at snf.stanford.edu
Mon Jun 20 15:04:44 PDT 2011


I think wafer is broken inside the chamber during 15 min seasoning. I saw alarm message about BSG pressure. the wafer does not come out after aborting.




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