Shutdown stsetch2 SNF 2011-06-21 18:20:48: wafer broken again

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed Jun 22 11:03:23 PDT 2011


Recovered the two wafer pieces left in the chamber.  Ran O2 plasma for 10 minutes and cycled wafers in and out with no problems.




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