From eenriquez at snf.stanford.edu Wed Mar 2 11:30:10 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:30:10 -0800 Subject: Shutdown stsetch2 SNF 2011-02-23 23:37:50: unable to load wafer Message-ID: Adjusted the arm starting position. Ran 2 wafers with no problems. From eenriquez at snf.stanford.edu Wed Mar 2 11:30:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:30:20 -0800 Subject: Comment stsetch2 SNF 2011-02-24 14:40:42: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 2 11:30:55 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:30:55 -0800 Subject: Problem stsetch2 SNF 2011-02-23 21:18:15: Load arm error Message-ID: Adjusted the arm starting position. From eenriquez at snf.stanford.edu Wed Mar 2 11:31:05 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 11:31:05 -0800 Subject: Comment stsetch2 SNF 2011-01-26 11:16:17: Replaced Freon 318 cylinder Message-ID: Archived From eenriquez at snf.stanford.edu Wed Mar 2 15:18:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 15:18:04 -0800 Subject: Problem stsetch2 SNF 2010-07-16 12:40:00: PMC1 alarm Message-ID: Jim Mc adjusted the RF matching network. From eenriquez at snf.stanford.edu Wed Mar 2 15:18:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 15:18:13 -0800 Subject: Problem stsetch2 SNF 2010-07-16 15:35:47: Same problem Message-ID: Jim Mc adjusted the RF matching network. From eenriquez at snf.stanford.edu Wed Mar 2 15:18:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 15:18:22 -0800 Subject: Problem stsetch2 SNF 2010-09-03 14:36:52: numerous PMC1 coil alarm for smooth-shalloow recipe Message-ID: Jim Mc adjusted the RF matching network. From eenriquez at snf.stanford.edu Fri Mar 11 14:47:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Mar 2011 14:47:37 -0800 Subject: Problem stsetch2 SNF 2011-02-22 10:51:31: Sticky roughing valve Message-ID: Adjusted valve position sensor. From srikantv at snf.stanford.edu Wed Mar 16 17:19:50 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Wed, 16 Mar 2011 17:19:50 -0700 Subject: Shutdown stsetch2 SNF 2011-03-16 17:19:50: broken piece inside chamber Message-ID: From eenriquez at snf.stanford.edu Wed Mar 16 19:12:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Mar 2011 19:12:47 -0700 Subject: Shutdown stsetch2 SNF 2011-03-16 17:19:50: broken piece inside chamber Message-ID: Removed broken piece and ran O2 plasma. From srikantv at snf.stanford.edu Thu Mar 17 23:57:42 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Thu, 17 Mar 2011 23:57:42 -0700 Subject: Shutdown stsetch2 SNF 2011-03-17 23:57:42: broken piece in chamber Message-ID: sorry! piece chipped off carrier wafer. From eenriquez at snf.stanford.edu Fri Mar 18 09:19:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Mar 2011 09:19:07 -0700 Subject: Shutdown stsetch2 SNF 2011-03-17 23:57:42: broken piece in chamber Message-ID: Removed broken piece and wiped down the electrode area. Cycled wafer and ran an O2 plasma. From mcvittie at snf.stanford.edu Fri Mar 18 17:28:34 2011 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Fri, 18 Mar 2011 17:28:34 -0700 Subject: Problem stsetch2 SNF 2011-03-18 17:28:32: Wafer Chuck Not Cooling Properly Message-ID: Measured wafer chuck temperature with no plasma step after running a 15 min test etch. The wafer temperature using a on-wafer monitor label indicated the chuck temperature was 80C while the chiller in the basement said the coolant temperature was 10C. This explains the wafer temperature problems we have been seeing on the tool. The second chiller is running at 20C so it does not appear that the chillers are hooked up wrong. I will do more tests on Monday to help figure out what is going on. From eenriquez at snf.stanford.edu Mon Mar 21 10:36:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Mar 2011 10:36:28 -0700 Subject: Comment stsetch2 SNF 2011-03-21 10:36:27: Pumped out O2 line Message-ID: O2 line was contaminated with N2 (pink plasma). Pumped out the gas line. From eenriquez at snf.stanford.edu Thu Mar 24 14:54:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Mar 2011 14:54:22 -0700 Subject: Comment stsetch2 SNF 2011-03-24 14:54:21: Update chunck not cooling Message-ID: When I disassembled the electrode I noticed that the outer section of the 2 piece indium gas had been deformed but the center piece did not have any signs of compression. So it appears that the center of the electrode is not making good contact with the cooling chuck. I installed a second piece of indium gasket to the center section and ran Jim's temperature test. The test came out OK (non of the temperature dots turned black). Jim will run another test to verify.