Comment stsetch2 SNF 2011-05-11 15:26:40: Update chuck temp

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Wed May 11 15:26:41 PDT 2011


Installed a TC at the output of the platen (first connector at the output of the feedthru box).  The temperature at the output reads 25 C when the input temperature is 10 C.  I ran the "KY SOI etch Ver2" for 30 minutes with no increase in the coolant output temperature.




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