From mdickey at snf.stanford.edu Tue Nov 1 05:25:19 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Nov 2011 05:25:19 -0700 Subject: Shutdown stsetch2 SNF 2011-11-01 05:25:18: tie in Message-ID: Down for flow meter tie in From mdickey at snf.stanford.edu Tue Nov 1 13:59:16 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Nov 2011 13:59:16 -0700 Subject: Comment stsetch2 SNF 2011-11-01 13:59:15: tie in Message-ID: Flow meter tie in done. Ramping up turbo From eenriquez at snf.stanford.edu Tue Nov 1 15:32:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Nov 2011 15:32:08 -0700 Subject: Shutdown stsetch2 SNF 2011-11-01 05:25:18: tie in Message-ID: System lost communication with devicenet 7 (turbo purge). Reset the devicenet and pumped down the chamber. From eenriquez at snf.stanford.edu Tue Nov 1 15:32:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Nov 2011 15:32:13 -0700 Subject: Comment stsetch2 SNF 2011-11-01 13:59:15: tie in Message-ID: System lost communication with devicenet 7 (turbo purge). Reset the devicenet and pumped down the chamber. From grahamab at snf.stanford.edu Wed Nov 2 09:52:01 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Wed, 2 Nov 2011 09:52:01 -0700 Subject: Shutdown stsetch2 SNF 2011-11-02 09:52:01: no O2 flow Message-ID: tried to run O2 plasma, but no O2 flow. Elmer reset the devicenet error, but still no flow. Still under investigation. From eenriquez at snf.stanford.edu Wed Nov 2 15:10:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Nov 2011 15:10:17 -0700 Subject: Shutdown stsetch2 SNF 2011-11-02 09:52:01: no O2 flow Message-ID: Reset the Devicenet 7 (gas control). Ran O2 plasma. From minchieh at snf.stanford.edu Tue Nov 15 09:17:02 2011 From: minchieh at snf.stanford.edu (minchieh at snf.stanford.edu) Date: Tue, 15 Nov 2011 09:17:02 -0800 Subject: Problem stsetch2 SNF 2011-11-15 09:17:02: backing pump unexpectedly stopped Message-ID: the backing pump stopped and triggered lots of other alarm. (This has happened quite often recently) Pump to base again & restart the process. From wangss at snf.stanford.edu Wed Nov 16 20:29:08 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Wed, 16 Nov 2011 20:29:08 -0800 Subject: Problem stsetch2 SNF 2011-11-16 20:29:07: Pump won't work Message-ID: try to restart more than 3 times. Failed. From wangss at snf.stanford.edu Wed Nov 16 20:37:48 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Wed, 16 Nov 2011 20:37:48 -0800 Subject: Shutdown stsetch2 SNF 2011-11-16 20:37:47: pump problem Message-ID: can not run recipe From eenriquez at snf.stanford.edu Thu Nov 17 09:06:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Nov 2011 09:06:17 -0800 Subject: Problem stsetch2 SNF 2011-11-15 09:17:02: backing pump unexpectedly stopped Message-ID: Adjusted the N2 purge and added oil to the roots blower. Ran O2 plasma. From eenriquez at snf.stanford.edu Thu Nov 17 09:09:17 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Nov 2011 09:09:17 -0800 Subject: Shutdown stsetch2 SNF 2011-11-16 20:37:47: pump problem Message-ID: Adjusted the N2 purge and added oil to the roots blower. Ran O2 plasma. From eenriquez at snf.stanford.edu Thu Nov 17 09:09:24 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 17 Nov 2011 09:09:24 -0800 Subject: Problem stsetch2 SNF 2011-11-16 20:29:07: Pump won't work Message-ID: Adjusted the N2 purge and added oil to the roots blower. Ran O2 plasma. From hsyoon at snf.stanford.edu Thu Nov 24 13:44:42 2011 From: hsyoon at snf.stanford.edu (hsyoon at snf.stanford.edu) Date: Thu, 24 Nov 2011 13:44:42 -0800 Subject: Shutdown stsetch2 SNF 2011-11-24 13:44:42: wafer broken inside the chamber Message-ID: backside gas controller alarm raised. tried to abort and manually transport out. wafer did not come out. From eenriquez at snf.stanford.edu Fri Nov 25 11:43:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:43:40 -0800 Subject: Shutdown stsetch2 SNF 2011-11-24 13:44:42: wafer broken inside the chamber Message-ID: Recovered the broken wafer. Cleaned the chamber and ran O2 plasma. From eenriquez at snf.stanford.edu Fri Nov 25 11:45:38 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:45:38 -0800 Subject: Problem stsetch2 SNF 2010-05-04 17:04:08: High reflected power Message-ID: Adjusted matching network set points. From eenriquez at snf.stanford.edu Fri Nov 25 11:46:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 25 Nov 2011 11:46:41 -0800 Subject: Problem stsetch2 SNF 2010-10-10 13:57:30: PMC1 alarm Message-ID: Tightened loose pump interface cable.