From eldwin at snf.stanford.edu Tue Oct 11 15:36:25 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Tue, 11 Oct 2011 15:36:25 -0700 Subject: Problem stsetch2 SNF 2011-10-11 15:36:25: turbo pump errors Message-ID: same turbo pump errors as above. this time the errors keep coming back very frequently (once every 5-10mins) From eenriquez at snf.stanford.edu Tue Oct 11 16:12:08 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 11 Oct 2011 16:12:08 -0700 Subject: Shutdown stsetch2 SNF 2011-10-11 16:12:08: Vacuum pump does will not restart Message-ID: From eenriquez at snf.stanford.edu Wed Oct 12 14:53:26 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 12 Oct 2011 14:53:26 -0700 Subject: Shutdown stsetch2 SNF 2011-10-11 16:12:08: Vacuum pump does will not restart Message-ID: Tightened loose communication connector to the pump From eenriquez at snf.stanford.edu Thu Oct 13 07:52:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 13 Oct 2011 07:52:54 -0700 Subject: Comment stsetch2 SNF 2011-10-13 07:52:54: Update turbo error Message-ID: Reseated communication connectors to the pump yesterday. From eenriquez at snf.stanford.edu Wed Oct 19 13:49:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:49:56 -0700 Subject: Problem stsetch2 SNF 2011-09-12 20:50:02: Turbo shutdown on it's own Message-ID: Have not re-occured since we reseated the communication cable to the vacuum pump. From eenriquez at snf.stanford.edu Wed Oct 19 13:50:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:50:04 -0700 Subject: Problem stsetch2 SNF 2011-09-27 12:26:25: turbo down Message-ID: Have not re-occured since we reseated the communication cable to the vacuum pump. From eenriquez at snf.stanford.edu Wed Oct 19 13:50:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:50:09 -0700 Subject: Problem stsetch2 SNF 2011-09-27 15:47:50: lots of errors Message-ID: Have not re-occured since we reseated the communication cable to the vacuum pump. From eenriquez at snf.stanford.edu Wed Oct 19 13:50:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:50:15 -0700 Subject: Problem stsetch2 SNF 2011-09-30 09:53:29: more problems Message-ID: Have not re-occured since we reseated the communication cable to the vacuum pump. From eenriquez at snf.stanford.edu Wed Oct 19 13:50:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:50:20 -0700 Subject: Problem stsetch2 SNF 2011-10-11 15:36:25: turbo pump errors Message-ID: Have not re-occured since we reseated the communication cable to the vacuum pump. From eenriquez at snf.stanford.edu Wed Oct 19 13:50:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:50:37 -0700 Subject: Comment stsetch2 SNF 2011-10-13 07:52:54: Update turbo error Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 19 13:51:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:51:27 -0700 Subject: Comment stsetch2 SNF 2011-08-23 12:37:58: Update pump/flow alarms Message-ID: Archived From eenriquez at snf.stanford.edu Wed Oct 19 13:51:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:51:40 -0700 Subject: Problem stsetch2 SNF 2011-08-23 12:11:24: got the same alarm error as yesterday. Process stopped 20 seconds after the plasma starts Message-ID: Have not re-occured since we reseated the communication cable to the vacuum pump. From eenriquez at snf.stanford.edu Wed Oct 19 13:53:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:53:34 -0700 Subject: Comment stsetch2 SNF 2011-08-03 17:55:11: Chiller flow Interlock problem Message-ID: No problem found. Hooked up chiller. Interlocks were ok. From eenriquez at snf.stanford.edu Wed Oct 19 13:54:09 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:54:09 -0700 Subject: Problem stsetch2 SNF 2011-08-02 16:10:28: not working Message-ID: Working ok From eenriquez at snf.stanford.edu Wed Oct 19 13:54:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:54:16 -0700 Subject: Comment stsetch2 SNF 2011-08-04 10:23:13: STS2-Water Flow Interlock Problem Message-ID: No problem found. Hooked up chiller. Interlocks were ok. From eenriquez at snf.stanford.edu Wed Oct 19 13:54:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:54:21 -0700 Subject: Comment stsetch2 SNF 2011-08-04 17:21:46: STS2 -Regarding the coil chiller interlock problem Message-ID: No problem found. Hooked up chiller. Interlocks were ok. From eenriquez at snf.stanford.edu Wed Oct 19 13:54:25 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Oct 2011 13:54:25 -0700 Subject: Comment stsetch2 SNF 2011-08-09 12:33:39: wafer came out not centered Message-ID: No problem found. Hooked up chiller. Interlocks were ok. From wangss at snf.stanford.edu Mon Oct 24 16:21:49 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Mon, 24 Oct 2011 16:21:49 -0700 Subject: Problem stsetch2 SNF 2011-10-24 16:21:49: temperature wonot stablize Message-ID: From eenriquez at snf.stanford.edu Tue Oct 25 11:26:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Oct 2011 11:26:54 -0700 Subject: Problem stsetch2 SNF 2011-10-24 16:21:49: temperature wonot stablize Message-ID: Reset the chamber heater. From npapte at snf.stanford.edu Sun Oct 30 18:46:29 2011 From: npapte at snf.stanford.edu (npapte at snf.stanford.edu) Date: Sun, 30 Oct 2011 18:46:29 -0700 Subject: Problem stsetch2 SNF 2011-10-30 18:46:29: keeps failing leak test Message-ID: i am seeing high leak rates of 30-40 mTorr/min even with a wafer with a clean backside . From eenriquez at snf.stanford.edu Mon Oct 31 10:07:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Oct 2011 10:07:20 -0700 Subject: Problem stsetch2 SNF 2011-10-30 18:46:29: keeps failing leak test Message-ID: Cleaned the electrode and ran O2 plasma.