From mislam at snf.stanford.edu Wed Sep 7 00:13:34 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 7 Sep 2011 00:13:34 -0700 Subject: Problem stsetch2 SNF 2011-09-07 00:13:33: Chuck (platen) temp on screen -50C Message-ID: While Fluke meter reading +35C. What is the real platen temp? From ysohn at snf.stanford.edu Sun Sep 11 13:48:43 2011 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Sun, 11 Sep 2011 13:48:43 -0700 Subject: Problem stsetch2 SNF 2011-09-11 13:48:42: chamber heater temp out of range Message-ID: Chamber heater temperature was out of range, and hence the machine refused to run any recipe repeatedly. To be specific, 120 C was a set point but the temperature was 100 C. From eenriquez at snf.stanford.edu Mon Sep 12 09:49:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Sep 2011 09:49:07 -0700 Subject: Shutdown stsetch2 SNF 2011-09-12 09:49:06: Lost communication with chamber TC Message-ID: the system has lost communication with the TC. The chamber temperature reading is stuck at 100 C. From eenriquez at snf.stanford.edu Mon Sep 12 14:36:14 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Sep 2011 14:36:14 -0700 Subject: Shutdown stsetch2 SNF 2011-09-12 09:49:06: Lost communication with chamber TC Message-ID: Reset the devicenet. Ran O2 clean. From eenriquez at snf.stanford.edu Mon Sep 12 14:36:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Sep 2011 14:36:41 -0700 Subject: Problem stsetch2 SNF 2011-09-11 13:48:42: chamber heater temp out of range Message-ID: Reset devicenet. Ran O2 clean with no problems. From eenriquez at snf.stanford.edu Mon Sep 12 14:38:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Sep 2011 14:38:07 -0700 Subject: Problem stsetch2 SNF 2011-09-07 00:13:33: Chuck (platen) temp on screen -50C Message-ID: Swapped the coil and the platten chiller's devicenet tees. From eenriquez at snf.stanford.edu Mon Sep 12 14:38:28 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Sep 2011 14:38:28 -0700 Subject: Comment stsetch2 SNF 2011-08-31 16:02:30: Update devicenet node 9 problem Message-ID: Archived From eenriquez at snf.stanford.edu Mon Sep 12 14:39:18 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Sep 2011 14:39:18 -0700 Subject: Problem stsetch2 SNF 2011-08-06 17:50:43: STS2- DeviceNet 9 (platen chiller ) Comm Problem Message-ID: Swapped the coil and the platten chiller's devicenet tees. From mislam at snf.stanford.edu Mon Sep 12 20:50:03 2011 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 12 Sep 2011 20:50:03 -0700 Subject: Problem stsetch2 SNF 2011-09-12 20:50:02: Turbo shutdown on it's own Message-ID: From cfchiang at snf.stanford.edu Fri Sep 16 13:17:02 2011 From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu) Date: Fri, 16 Sep 2011 13:17:02 -0700 Subject: Comment stsetch2 SNF 2011-09-16 13:17:01: residue on the backside of the wafers Message-ID: Found wafers came out offcentered and there were residues on the backside From wangss at snf.stanford.edu Mon Sep 19 14:56:04 2011 From: wangss at snf.stanford.edu (wangss at snf.stanford.edu) Date: Mon, 19 Sep 2011 14:56:04 -0700 Subject: Problem stsetch2 SNF 2011-09-19 14:56:03: Chamber need to be cleaned Message-ID: A lot of residue was left on the back of the wafers. Wafers come out off centered. From eenriquez at snf.stanford.edu Tue Sep 20 10:15:34 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:15:34 -0700 Subject: Problem stsetch2 SNF 2011-09-19 14:56:03: Chamber need to be cleaned Message-ID: Cleaned the platten and ran O2 Clean. From eenriquez at snf.stanford.edu Tue Sep 20 10:15:39 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 20 Sep 2011 10:15:39 -0700 Subject: Comment stsetch2 SNF 2011-09-16 13:17:01: residue on the backside of the wafers Message-ID: Cleaned the platten and ran O2 Clean. From eldwin at snf.stanford.edu Tue Sep 27 12:26:26 2011 From: eldwin at snf.stanford.edu (eldwin at snf.stanford.edu) Date: Tue, 27 Sep 2011 12:26:26 -0700 Subject: Problem stsetch2 SNF 2011-09-27 12:26:25: turbo down Message-ID: turbo pump error - wafers still inside From grahamab at snf.stanford.edu Tue Sep 27 15:47:51 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Tue, 27 Sep 2011 15:47:51 -0700 Subject: Problem stsetch2 SNF 2011-09-27 15:47:50: lots of errors Message-ID: during recipe (ran several times prior), numerous errors popped up and everything went red. after clearing alarms and aborting everything, pumped to base (turbo turned off) and it came back up. Cesar also said he put the backing pump to local mode in the basement, but that was happening the same time I was clearing alarms. From grahamab at snf.stanford.edu Fri Sep 30 09:53:29 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 30 Sep 2011 09:53:29 -0700 Subject: Problem stsetch2 SNF 2011-09-30 09:53:29: more problems Message-ID: same problems as a few days ago. after having already etched several wafers, the etched stopped in the middle of the recipe due to numerous faults including the pump turning off. aborting everything and pumping to base seemed to work, but this shouldn't be a new condition of running the tool.