Problem stsetch2 SNF 2011-09-12 20:50:02: Turbo shutdown on it's own
mislam at snf.stanford.edu
mislam at snf.stanford.edu
Mon Sep 12 20:50:03 PDT 2011
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Problem stsetch2 SNF 2011-08-06 17:50:43: STS2- DeviceNet 9 (platen chiller ) Comm Problem
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Comment stsetch2 SNF 2011-09-16 13:17:01: residue on the backside of the wafers
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Problem stsetch2 SNF 2011-08-06 17:50:43: STS2- DeviceNet 9 (platen chiller ) Comm Problem
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Comment stsetch2 SNF 2011-09-16 13:17:01: residue on the backside of the wafers
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